In this study, CuInSe2 thin films were prepared by the reaction of identica
l metallic alloys with three different chalcogenide sources. Comparisons we
re drawn in terms of morphological features, the formation of crystalline p
hases, level of Se incorporation and the degree of in-depth compositional u
niformity after each reaction process. For a given set of experimental para
meters (i.e. specific reaction temperature and exposure period), H2Se/Ar tr
eated samples showed superior structural features. higher levels of Se inco
rporation and improved in-depth compositional uniformity. From this fundame
ntal study, considerable insight was gained regarding the growth kinetics o
f the respective selenization processes. (C) 2001 Published by Elsevier Sci
ence B.V. All rights reserved.