Large area thin films of Cu(In,Ga)Se, (CIGS) were grown by sequential sputt
ering. Photovoltaic cells have been fabricated using these films and the pe
rformance has been characterized. The effect of annealing conditions (tempe
rature and duration) of the CIGS film on the device performance has been in
vestigated. SEM studies of the films correlate the microstructure of the CI
GS films with the solar cell efficiency. Cell efficiencies in excess of 10%
have been achieved by using optimized annealing conditions. The optical pr
operties of the CIGS films were characterized using Variable Angle Spectros
copic Ellipsometry (VASE). The Gaussian broadened polynomial superposition
(GBPS) parametric relationship is used to describe the optical properties o
f CIGS films below, above and through the bandgap energy. The present resul
ts show that spectroscopic ellipsometry may be used in situ to monitor and
optimize him growth conditions and achieve high efficiencies. (C) 2001 Else
vier Science B,V, All rights reserved.