Reaction mechanism and kinetics for the chemical bath deposition of In(OH)(x)S-y thin films

The solution chemistry of InCl3-CH3CSNH2-CH3COOH (InCl3-TA-HAcO) system has been studied and the species distribution diagrams, solubility and precipi tation curves have been calculated. At an acidic pH (1-4), the (InCl3-TA-HA cO) solution contains mainly indium-chloro-complexes and In(OH)(3) precipit ation is not expected when HAcO is added. Kinetic calculations based on TA hydrolysis have shown that indium hydroxide-sulfide [In(OH)(x)S-y] precipit ation takes place through a mechanism faster than TA hydrolysis, probably a direct reaction between TA and any indium-chloro-complex, leading to diffe rent products depending on the pH of the deposition solution. (C) 2001 Else vier Science B.V. All rights reserved.