In microcrystalline hydrogenated silicon (muc-Si:H), the drift mobility dep
endencies of holes on electric field and temperature have been measured by
using a method of equilibrium charge extraction by linearly increasing volt
age. At room temperature the estimated value of the drift mobility of holes
is much lower than in crystalline silicon and slightly higher than in amor
phous hydrogenated silicon (a-Si:H). In the case of stochastic transport of
charge carriers with energetically distributed localized states, the numer
ical model of this method gives insight into the mobility dependence on ele
ctric field. From the numerical modeling and experimental measurement resul
ts, it follows that the hole drift mobility dependence on electric field is
predetermined by electric field stimulated release from localized states.
(C) 2001 American Institute of Physics.