Time-resolved acquisition technique for elemental mapping by energy-filtering TEM

A time-resolved acquisition technique for elemental mapping has been invest igated for the heavy element barium (Ba) in (Ba-0.5, Sr-0.5)TiO3 (BST) by e nergy-filtering transmission electron microscopy (EF-TEM). Based on the con ventional three-window method, five images were separately acquired for eac h energy region (about 780 eV signal region, and pre-1 and pre-2 energy reg ions). After correcting for image shift, the five images were added to form a new processed image in each energy region. Then, Ba element mapping was performed by using the conventional three-window procedure. This time-resol ved technique was found to improve signal-to-noise ratio for 100 s total ex posure time without increasing the image blurring problem.