It is found that the T-3(p,n)He-3 reaction changes the concentration profil
e of a TiT thin film, which is a MeV neutron target, owing to proton irradi
ation of a few coulomb. The concentrations in the TiT thin film, including
the areal densities of Ti and T, were estimated by using several analytical
methods, such as He Rutherford backscattering, proton Rutherford backscatt
ering, and elastic recoil detection time of flight, and by measuring total
neutron cross-sections of C-12 and O-16 before and after T-3(p,n)He-3 react
ion. The respective areal densities of T and Ti in the TiT thin film were 3
.8 x 10(18) particles/cm(2) and 1.3 x 10(19) particles/cm(2) after several
T-3(p,n)He-3 reactions, and these values, which were obtained by several an
alytical methods, coincided within 5%. These results were compared with the
data provided by the target-producing company.