Characterisation of the geometry of indenters used for the micro- and nanoindentation method

In this paper, experience gathered during the measurement of the geometry o f indenters for the micro- and nanoindentation test using a scanning force microscope is reported. A usable accuracy of the geometrical parameters of a microhardness indenter can be obtained only if the scanning force microsc ope has been calibrated. The evaluation of the indenter geometry is describ ed according to two methods: On the one hand the determination of the geome trical parameters plane angle, tip radius and length of line of junction in the microhardness range and on the other hand the calculation of area func tions which are suitable for the nanohardness range. The accuracy of these evaluation methods is estimated. (C) 2001 Elsevier Science Ltd. All rights reserved.