ORMOCER (R) S - Inorganic-organic hybrid materials for e/o-interconnection-technology

Hybrid inorganic-organic polymers (ORMOCER (R)s) have been developed and te sted for evaluation in optical and electrical interconnection technology. T he photopatternable materials with negative resist behaviour are composed o f inorganic oxidic structures cross-linked or substituted by organic groups . They are prepared from organosilane precursors by sol-gel-processing in c ombination with organic crosslinking of polymerizable organic Functions, As a result of these functionalities the properties of the ORMOCER (R)s can b e adjusted to particular applications. Systematic variation of composition combined with adaptation to micro system technology allows great flexibilit y in processing. The main features of these materials are: Combined use as dielectric and passivation layers in electrical systems and devices as well as core and cladding for optical applications enables e/o applications with high integration levels, Postbaking at moderate temperatures (120 degreesC - 170 degreesC) enables p rocessing on low-cost substrates such as FR-4 and BT. Easily adaptable to thin film technology: spin-on with planarisation >90% a nd via diameters down to 20 mum have been achieved.