Vertically coupled GaInAsP-InP microring resonators

Vertically coupled microring resonator channel-dropping filters are demonst rated in the GaInAsP-InP material system. These devices were fabricated wit hout regrowth. In this method, low-loss single-mode waveguides are removed from the grow th substrate and bonded to a GaAs transfer substrate with ben zocyclobutene. This permits fabrication of vertically coupled waveguides on both sides of the epilayer. Optical quality facets are obtained by cleavin g through the transfer substrate. Operation of single-mode, single-ring opt ical channel-dropping filters is demonstrated. (C) 2001 Optical Society of America.