Effect of an internal rotating current on low-frequency inductively coupled plasmas - art. no. 046402

The effect of an internal low-frequency rotating current on inductively cou pled plasmas in cylindrical chambers is studied. The electromagnetic field structure, power density distribution, the plasma density, and the operatin g regimes of the discharge are investigated using electrodynamic, power, an d particle balance equations. It is shown that the rotating current sheet c an dramatically improve the uniformity of the electromagnetic fields and th e power transferred to the plasma electrons from that of conventional low-f requency inductively coupled plasma sources with external flat spiral induc tive coils.