We present the atomic structure of the c(8 X 2) reconstructions of InSb-, I
nAs-, and GaAs-(001) surfaces as determined by surface x-ray diffraction us
ing direct methods. Contrary to common belief, group III dimers are not pro
minent on the surface, instead subsurface dimerization of group m atoms tak
es place in the second bilayer, accompanied by a major rearrangement of the
surface atoms above the dimers to form linear arrays. By varying the occup
ancies of four surface sites the (001)-c(8 X 2) reconstructions of III-V se
miconductors can be described in a unified model.