A new device of abrasive jet machining and application to abrasive jet printer

A new abrasive jet machining (AJM) device has been developed for precise et ching and patterning of hard and brittle materials, such as ceramics, glass and silicon. However, since conventional AJM devices cannot control precis ely the amount of blasting abrasives, applying this method to precision mac hining has been difficult. Moreover, in the machining of small holes, colli ding abrasives accumulate in the bottom of the hole, preventing the direct impact of successive abrasives onto the workpiece. As a result, the machini ng efficiency decreases as the machining progresses. In the present paper, the machining characteristics of the new AJM device are investigated, and d irect etching and patterning of glass without masking are demonstrated.