Implantation-plasma nitriding

Martensite steel 0.5Cr12Ni2MoMgMn and titanium alloy TiMo1Zr4.5Sn3 were nit rided by high intensity nitrogen plasma bombardment (current densities were 3.10(16) cm(-2) s(-1) and 1.2.10(17)cm(-2) s(-1) for martensite steel and titanium alloy correspondingly). Preliminary 30-keV N-2(+) ion implantation and subsequent plasma treatment essentially increases N penetration depth two orders of magnitude and surface hardness by a factor similar to3. Appro ximately the same effect was received also at low energy (300eV) and high i ntensity Ar+ ion prebombardment and subsequent nitrogen plasma treatment. N ear the surface a X-ray amorphous layer is created as a result of implantat ion-plasma treatment. High dose implanted atoms penetration is explained by their repulsive interaction and diffusion along dislocations.