Rigorous electromagnetic theory has been used to optimize elastomeric phase
masks for generating sub-100-nm parallel lines by means of near-field phot
olithography J. A. Rogers , Appl. Phys. Lett. 70, 2658 (1997). In the near-
field region, the scattering effect is so strong that the scalar theory is
no longer adequate: A bright line was found adjacent to the dark line previ
ously predicted by the scalar theory, and the widths of both lines were fou
nd to be insensitive to the refractive index of the photoresist. The simula
tion results are in good agreement with experimental studies, which showed
that the bright and dark lines could be used to generate trenches and lines
in a positive-tone photoresist by controlling the exposure time. Our simul
ations also indicate that parallel lines as small as 50 nm can be generated
by adjusting the parameters of the phase mask. (C) 2001 American Institute
of Physics.