G. Tessier et al., Quantitative thermal imaging by synchronous thermoreflectance with optimized illumination wavelengths, APPL PHYS L, 78(16), 2001, pp. 2267-2269
Using thermoreflectance microscopy with a camera, we have designed a system
which delivers submicronic images of the alternative temperature variation
s in integrated circuits working in a modulated regime. A careful choice of
the illumination wavelength permits us to highlight the heating in chosen
parts of the sample and to optimize the thermoreflectance signal. We measur
e and explain the modifications of the photothermal response which are indu
ced by the presence of a passivation layer. A calibration conducted on vari
ous materials with a thermocouple gives access to the absolute alternative
temperature variations in integrated circuits working at frequencies betwee
n 0.1 Hz (quasipermanent regime) and 5 MHz. (C) 2001 American Institute of
Physics.