Some peculiarities of pulsed laser deposition of large area thin films

The fabrication of large area Y-Ba-Cu-O thin films by pulsed laser depositi on will be discussed, The influence of laser spot dimension, laser fluence and the target topography on the plasma plume angular distribution has been investigated. Film-based method was used for determining angular distribut ion. The primary factors affecting the form of the plume have been determin ed. Spatial distribution of laser-generated particulates has been investiga ted too. A simple method to obtain large area thin films by deposition thro ugh a mask has been examined for reducing the number of particulates.