Local microwave surface resistance variations Of the YBaCuO thin films patterned by selective laser irradiation and plasma fluorination

this paper, we have studied the planar patterning of the YBa2Cu3O7-delta th in films by laser irradiation and ion plasma treatment, The laser ablated Y Ba2Cu3O7-delta thin films have been modified either by selective laser irra diation or by plasma fluorination in an atmosphere of CF4 to pattern microw ave devices, Transport measurements and microstructure analysis have been u sed to study the effects of the selective laser irradiation or plasma fluor ination on the superconductivity of the YBa2Cu3O7-delta thin films. A scann ing microwave near-field microscopy has been involved to investigate the lo cal microwave surface resistances of the patterned devices. Enhancement of the microwave surface resistance has been found in the treated regions of t he YBa2Cu3O7-delta thin films by selective laser irradiation or plasma fluo rination. These results would be helpful in evaluating the microwave perfor mance of the devices.