Fabrication of miniaturized tunnel junctions based on high-melting metals b
y the shadow evaporation technique is rather complicated. The thermal load
of the suspended bridge mask during metal evaporation is assumed to be the
most serious problem. As an alternative we have developed a preparation tec
hnique using e-beam direct-writing lithography in conjunction with material
deposition by sputtering. To test the preparation process, we have fabrica
ted single electron transistors (SETs) based on the metals Al and Nb, inclu
ding mixed Al/Nb samples. For SETs made completely of Nb, we preferred AlOx
to the natural oxide NbOx for barrier generation. The yield of functioning
samples amounted to about 80%. By means of simple considerations we have e
stimated the tunnel capacitances to be of the order of a few 10(-16)F, the
tunnel resistance spread was less than one order of magnitude.