Superconducting half-wave microwave resonator on YSZ buffered Si (100)

We have produced high quality superconducting half-wave microwave resonator s on YBCO/YSZ/Si heterostructures, The YSZ was grown on (100) Si by pulsed de magnetron sputtering at 820 degreesC in 37 mTorr Ar/O-2, YBCO was then d eposited on the YSZ/Si by pulsed laser ablation at 760 degreesC in 0.5 Torr of O-2. A coplanar meander-line structure was patterned and its microwave characteristics measured, The results indicate Si to be a definite candidat e for microwave applications producing Q values exceeding 50,000 at 4 GHz f or T < 30 K, The microwave properties compare favorably to those obtained f rom identical resonators patterned on normal metal and YBCO/LaAlO3 at 30 K.