NIST is fabricating multi-pixel arrays of transition edge sensor (TES) micr
ocalorimeter detectors for use in microanalysis and x-ray astrophysics, We
have developed both room temperature digital feedback electronics and a suc
cessful SQUID multiplexing technology that will be applied to form a practi
cal, expandable system. We are also exploring surface micromachining techni
ques to enable the fabrication of large-scale, close-packed arrays of TES m
icrocalorimeters.