Low temperature scanning laser microscopy (LTSLM) is demonstrated to be cap
able of imaging sub-THz electromagnetic fields in cryoelectronic integrated
structures. This method allows one to evaluate the spatial distribution of
time-averaged field amplitudes with a resolution of about one micrometer f
or samples with characteristic dimensions of order millimeters. Using LTSLM
, cryoelectronic devices with both passive and active superconducting eleme
nts can be characterized. Local heating of superconducting structures by a
laser beam introduces extra loss for the propagating and standing sub-milli
meter waves. We present LTSLM images of two-dimensional 400 to 500 standing
GHz wave patterns in integrated superconducting receiver chips.