Two type of sensor geometries of voltage-biased Xray microcalorimeters with
a phase-transition thermometer have been built and tested. Both devices sh
ow, in addition to the well-known noise sources of thermal fluctuation nois
e or phonon noise from the heatlink to the bath and Johnson noise from the
thermometer resistance, also thermal fluctuation noise from the thermometer
itself. In both cases however the measured energy resolution is limited by
other sources. The energy resolution of the asymmetric lateral type of sen
sor, 12 to 15 eV @ 5.9 keV, is limited by a position dependent heatleak of
the absorber to the bath. The energy resolution of the symmetric lateral se
nsor, 6.8 +/- 0.3 eV FWHM @ 5.9 keV, is limited by excess noise at frequenc
ies below 1000 Hz. The origin of this noise component is unknown sofar.