Fabrication and characterization of superconducting X-ray calorimeters with transition edge sensors

We have developed superconducting calorimeters using transition edge sensor s (TESs) for industrial X-ray microanalysis. To obtain high count rate, hig h reliability, and high energy resolution, a large format array of the sens ors and an integration of a TES calorimeter and a SQUID amplifier are requi red. A novel calorimeter fabrication process has been established, in which a micro-machining technology using a silicon-on-insulator wafer was applie d, A 4-pixel Au/Ti TESs calorimeter was fabricated using this process, SQUI D amplifiers suitable for the calorimeter have also been designed and fabri cated. It is expected to achieve a count rate per pixel of 7.1kcps, The exp ected energy resolution including the SQUID contribution was estimated at 1 7-21eV, It has been confirmed that the SQUID contribution for the current n oise of our calorimeter can almost be ignored. It has also been confirmed t hat an array of 14 or more pixel are required that to achieve an effective count rate of more than 100kcps.