Josephson junctions have been formed in YBa2Cu3O-(-delta) by ion implantati
on though apertures in 450nm thick Au masks using 50 keV H implants with fl
uences up to 5X 10(15)cm(-2). The mask apertures were milled with a focused
30keV Ga ion beam giving a best measured electrical junction length of abo
ut 70nm. Resistively shunted junction behavior has been observed over a wid
e temperature range (about 10K). Sharpiro steps have also been measured on
these devices. The influence of possible Ga contamination is discussed.