10 pF gas-dielectric capacitors made of fused silica doped with titanium ox
ide have been developed, The capacitance was defined by the critical dimens
ions of the electrodes in a monolithic structure. The characteristics of th
e capacitors were found to show a temperature coefficient of -1.8 x 10(-7)/
K, with a deviation from the nominal value of a few parts in 10(6) and a di
ssipation factor of less than 3 X 10(-7). Their long-term stability is expe
cted to be in the order of one part in 10(8).