Crack patterns of 53 nm and 103 nm thick silicon oxide coatings on poly(eth
ylene terephthalate) films are analyzed under equibiaxial stress loading, b
y means of a bulging cell mounted under an optical microscope with stepwise
pressurization of film specimens. The biaxial stress and strain are modele
d from classical elastic membrane equations, and an excellent agreement is
obtained with a finite element method. In the large pressure range, the der
ivation of the biaxial strain from force equilibrium considerations are fou
nd to reproduce accurately the measured data up to 25% strain. The examinat
ion of the fragmentation process of the coating under increasing pressure l
evels reveals that the crack onset strain of the oxide coating is similar t
o that measured under uniaxial tension. The fragmentation of the coating un
der biaxial tension is also characterized by complex dynamic phenomena whic
h image the peculiarities of the stress field, resulting in considerable br
oadening of the fragment size distribution. The evolution of the average fr
agment area as a function of biaxial stress in the early stages of the frag
mentation process is analyzed using Weibull statistics to describe the coat
ing strength. (C) 2001 Kluwer Academic Publishers.