Vanadium pentoxide (V2O5) thin films have been produced by pulsed laser dep
osition. AFM, Raman, optical and electrical measurements have been made on
the films in order to understand the growth mechanism of laser ablated V2O5
thin films. The investigations revealed the growth of stoichiometric and h
igh-quality V2O5 thin films at low substrate temperatures. The optical band
gap and the electrical conductivity of V2O5 thin films grown at a temperat
ure of 200 degreesC at an oxygen partial pressure of 100 mTorr are 2.35 eV
and 10(-4) S cm(-1), respectively.