In situ real-time studies of nickel silicide phase formation

The formation of NiSi films on Si was studied using Rutherford backscatteri ng spectrometry, atomic force microscopy, and ellipsometry. NiSi is an attr active candidate for use as a gate contact material due to its low metal-li ke resistivity and large processing window (350-750 degreesC). Three phases , Ni2Si, NiSi, and NiSi2, were identified in this temperature range, and th eir optical databases in the 2-4 eV photon range were established, and used to model real-time ellipsometry data. It is shown that real-time ellipsome try can be used to monitor and follow the formation of the various Ni-Si ph ases. We have also observed the onset of agglomeration of the silicide for longer time anneals at temperatures of 500-700 degreesC, which is much lowe r than 1000 degreesC where agglomeration has been reported to occur. (C) 20 01 American Vacuum Society.