Emission uniformity enhancement between microfabricated tips in cold cathode arrays

Authors
Schwoebel, PR Spindt, CA Holland, CE Panitz, JA
Citation
Pr. Schwoebel et al., Emission uniformity enhancement between microfabricated tips in cold cathode arrays, J VAC SCI B, 19(2), 2001, pp. 582-584
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
19
Issue
2
Year of publication
2001
Pages
582 - 584
Database
ISI
SICI code
1071-1023(200103/04)19:2<582:EUEBMT>2.0.ZU;2-0
Abstract
The current-voltage characteristics can vary significantly between individu al microfabricated tips in as-fabricated arrays of cold cathodes. Such emis sion nonuniformity is undesirable in device applications. We have shown tha t in situ tip self-heating by the emitted electron current can be used to m ake the current-voltage characteristics of microfabricated field emitter ti ps nearly identical to one another. The improved emission uniformity will a llow for more reliable array operation at increased electron emission curre nt densities. (C) 2001 American Vacuum Society.