Ion-plating deposition of MgO thin films

We developed an advanced ion-plating (AIP) method and deposited MgO thin fi lms For protective layer in plasma display panel (PDP) with it. The preferr ed orientation of the films was dependent on deposition conditions: oxygen content and substrate temperature. The Blm was mainly (111) oriented with a small amount of randomly oriented textures. Fine columnar structures grew vertically from the substrate interface with sharp apexes at the film surfa ce. It was supposed that the him structure could be improved a great deal f or PDP applications by our AIP.