Microelectro-mechanical systems: Technology and applications

Authors
Bishop, D Heuer, A Williams, D
Citation
D. Bishop et al., Microelectro-mechanical systems: Technology and applications, MRS BULL, 26(4), 2001, pp. 282-282
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MRS BULLETIN
ISSN journal
08837694 → ACNP
Volume
26
Issue
4
Year of publication
2001
Pages
282 - 282
Database
ISI
SICI code
0883-7694(200104)26:4<282:MSTAA>2.0.ZU;2-T