Surface micromachining: A brief introduction

Authors
Mehregany, M Zorman, CA
Citation
M. Mehregany et Ca. Zorman, Surface micromachining: A brief introduction, MRS BULL, 26(4), 2001, pp. 289-290
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MRS BULLETIN
ISSN journal
08837694 → ACNP
Volume
26
Issue
4
Year of publication
2001
Pages
289 - 290
Database
ISI
SICI code
0883-7694(200104)26:4<289:SMABI>2.0.ZU;2-S