Integrated MEMS technologies

Authors
Franke, AE King, TJ Howe, RT
Citation
Ae. Franke et al., Integrated MEMS technologies, MRS BULL, 26(4), 2001, pp. 291-295
Citations number
19
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MRS BULLETIN
ISSN journal
08837694 → ACNP
Volume
26
Issue
4
Year of publication
2001
Pages
291 - 295
Database
ISI
SICI code
0883-7694(200104)26:4<291:IMT>2.0.ZU;2-F