On-chip testing of mechanical properties of MEMS devices

Authors
Kahn, H Heuer, AH Ballarini, R
Citation
H. Kahn et al., On-chip testing of mechanical properties of MEMS devices, MRS BULL, 26(4), 2001, pp. 300-301
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MRS BULLETIN
ISSN journal
08837694 → ACNP
Volume
26
Issue
4
Year of publication
2001
Pages
300 - 301
Database
ISI
SICI code
0883-7694(200104)26:4<300:OTOMPO>2.0.ZU;2-2