Authors
Citation
Dm. Freeman, Measuring motions of MEMS, MRS BULL, 26(4), 2001, pp. 305-306
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MRS BULLETIN
ISSN journal
08837694
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Volume
26
Issue
4
Year of publication
2001
Pages
305 - 306
Database
ISI
SICI code
0883-7694(200104)26:4<305:MMOM>2.0.ZU;2-6