Authors
Citation
Sw. Pang, High-aspect-ratio structures for MEMS, MRS BULL, 26(4), 2001, pp. 307-308
Citations number
14
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MRS BULLETIN
ISSN journal
08837694
→ ACNP
Volume
26
Issue
4
Year of publication
2001
Pages
307 - 308
Database
ISI
SICI code
0883-7694(200104)26:4<307:HSFM>2.0.ZU;2-0