Uniform focal spot, with flat top, steep edge, low side lobe and high light
efficiency, is required in many high power laser system. Using diffractive
optical element (DOE) to realize such uniform illumination has many advant
ages, such as high light efficiency of pure phase modulation, strong flexib
ility of phase design and so on. A kind of hybrid algorithm based on hill-c
limbing and simulated annealing is utilized for phase design, owing to the
strong convergence of the hill-climbing and the global optimization potenti
al of the simulated annealing. A continuous phase DOE with diameter 100 mm
has been fabricated by a rotating hollowed-out mask and ion-etching on the
K9-glass substrate. The interferogram of the DOE is given to show the smoot
hness of the phase distribution. The intensity distribution of the focal sp
ot are measured by a general CCD, acid a series of attenuators are used to
increase the dynamic range of the measurement. The results after data-proce
ssing show that the uniform focal spot with certain uniformity at the main
lobe, sharp edge, low side lobe and without sharp peak at the zero order ha
s been obtained. (C) 2001 Elsevier Science Ltd. All rights reserved.