A new stacking fault formation mechanism has been observed for the first ti
me in ZnO/LiTaO3 heteroepitaxial films. Nigh resolution electron microscopy
studies combined with electron diffraction and numerical image computation
suggest that the observed type II intrinsic stacking faults in an epitaxia
l film can be dominantly formed as a result of tilting of the lattices betw
een films and substrate required to maintain a particular orientation relat
ionship.