Microbridge testing of silicon oxide/silicon nitride bilayer films deposited on silicon wafers (vol 48, pg 4901, 2000)

Authors
Su, YJ Qian, CF Zhao, MH Zhang, TY
Citation
Yj. Su et al., Microbridge testing of silicon oxide/silicon nitride bilayer films deposited on silicon wafers (vol 48, pg 4901, 2000), ACT MATER, 49(8), 2001, pp. 1495-1495
Citations number
1
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
ACTA MATERIALIA
ISSN journal
13596454 → ACNP
Volume
49
Issue
8
Year of publication
2001
Pages
1495 - 1495
Database
ISI
SICI code
1359-6454(20010508)49:8<1495:MTOSON>2.0.ZU;2-I