Micro and sub-micro fabrication techniques for optically confined structures based on lithium fluoride

Lithium fluoride (LiF) films treated by low-energy electrons represent a ve ry promising candidate for the realization of miniaturized broad band optic al devices like active waveguides and microcavities. The main properties, i n particular the refractive index, density, structure and microstructure, o f polycrystalline LiF films grown by thermal evaporation on amorphous and c rystalline substrates are discussed, together with their influence on colou r centres formation induced by low-energy electron beam bombardment and on the choice of the main irradiation conditions. Copyright (C) 2001 John Wile y & Sons, Ltd.