Mh. Kim et al., Growth of high-quality GaN on Si(111) substrate by ultrahigh vacuum chemical vapor deposition, APPL PHYS L, 78(19), 2001, pp. 2858-2860
An ultrahigh vacuum chemical vapor deposition (UHVCVD) system was employed
to grow high-quality GaN on a Si (111) substrate using a thin AlN buffer la
yer. X-ray diffraction, high-resolution electron microscopy (HREM), and pho
toluminescence (PL) data indicate that a single crystalline GaN layer with
a wurtzite structure was epitaxially grown on a silicon substrate. The full
width at half maximum (FWHM) of the x-ray rocking curve for the GaN (0002)
diffraction was 16.7 arc min. A cross-sectional HREM image showed an amorp
hous SiNx layer at the Si/AlN interface, as well as stacking faults and inv
ersion domain boundaries in the GaN epilayer. An intense PL emission line,
which is associated with the recombination of the donor bound exciton, was
observed at 10 K PL spectra (FWHM = 6.8 meV) and a strong band edge emissio
n was obtained (FWHM=33 meV) as well, even at room temperature. These resul
ts indicate that high-quality GaN can be grown on Si (111) substrates using
a UHVCVD growth method. (C) 2001 American Institute of Physics.