The N content and lattice parameter of GaN(x)As(1-x)epilayers on GaAs (0 <
x < 0.03) were determined by secondary ion mass spectroscopy and x-ray diff
raction measurements, respectively. A significant deviation of the lattice
parameter variation in GaNxAs1-x from Vegard's law between GaAs and cubic G
aN was observed, which leads to overestimation of the nitrogen content by u
p to 30% for x less than or equal to 2.5%. The physical origin of this nega
tive deviation is discussed. (C) 2001 American Institute of Physics.