NEW SPECTROMETER FOR GRAZING EXIT X-RAY-FLUORESCENCE

Among the x-ray fluorescence techniques using energy dispersive system s, the excitation in the total reflection regime is becoming widesprea d. This technique may be applied to surface analysis if the fluorescen t radiation emitted by the sample is measured as a function of the gra zing incidence angle. The main limitation hi performing this sort of a nalysis is the need to use a monochromator, which notably reduces the incident flux of radiation. Besides, the method requires the radiated surface to be perfectly smooth and polished and to have a total length of some centimeters. A similar technique known as grazing exit x-ray fluorescence presents certain advantages and is easier to implement. B y this method, fluorescent photons in terms of the grazing exit angle are detected. In this work, a spectrometer for performing surface anal ysis at grazing exit is described, the different experimental situatio ns are analyzed, and some measurements performed with this device are shown. (C) 1997 American Institute of Physics.