GUIDANCE CHARACTERISTICS OF SOME DISPLACEMENT DEVICES USED A HIGH-PRECISION HE-NE-LASER DISPLACEMENT MEASUREMENT SYSTEM

The guidance characteristics of three different translation stages for application as the driver in a high precision displacement transducer calibration instrument (measuring laser) were assessed, A high voltag e PZT tube, a low voltage three-segment PZT, and a corrugated diaphrag m displacement device with a magnetic coil drive were investigated. Th e maximum yaw and pitch angles of the PZT tube were 8 and 5 '', respec tively, for a translation of 3 mu m. The maximum guiding deviation of the three-segment PZT for a displacement of 13 mu m was 38 '' (yaw) an d 17 '' (pitch) when applying the same voltage to all segments. The ma ximum guiding deviation, however, was able to be reduced to +/-0.4 '' by applying different voltages to individual PZT segments. The guiding deviation of a corrugated diaphragm with a magnetic coil drive was +/ -0.6 '' (yaw) and +/-0.4 '' (pitch) for a displacement of +/-100 mu m. The corrected three-segment PZT as well as the corrugated diaphragm d evice are suited for application with the measuring laser of this arti cle. (C) 1997 American Institute of Physics.