ANISOTROPY-INDEPENDENT THROUGH MICROMACHINING OF QUARTZ RESONATORS BYION TRACK ETCHING

A method to achieve deep and crystal cut-independent structuring of ar bitrary lateral geometry in single crystalline quartz is demonstrated. It is based on local etching of the latent track-induced anisotropy r esulting from heavy ion bombardment, and is close to independent of cr ystallographic orientation. Previous results are briefly reviewed and a more systematic and thorough study is presented. Miniature tuning fo rk structures of various sizes and directions have been realized, and the suitability for frequency control device production is discussed.