MEMS: Micro technology, mega impact

Authors
Nagel, DJ Zaghloul, ME
Citation
Dj. Nagel et Me. Zaghloul, MEMS: Micro technology, mega impact, IEEE CIRC D, 17(2), 2001, pp. 14-25
Citations number
16
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE CIRCUITS & DEVICES
ISSN journal
87553996 → ACNP
Volume
17
Issue
2
Year of publication
2001
Pages
14 - 25
Database
ISI
SICI code
8755-3996(200103)17:2<14:MMTMI>2.0.ZU;2-6