This paper tackles the difficult task to extract MOS parameters by a new mo
del of the gate capacitance that takes into account both poly-Si depletion
and charge quantization and includes temperature effects. A new fast and it
erative procedure, based on this simplified self-consistent model, will be
presented to estimate simultaneously the main MOS system parameters (oxide
thickness, substrate, and poly-Si doping) and oxide held, surface potential
s at the Si/SiO2 and at the poly-Si/SiO2 interfaces. Its effectiveness will
be demonstrated by comparing oxide field and oxide thickness to those extr
acted by other methods proposed in the literature. Moreover, these methods
are critically reviewed and we suggest improvements to reduce their errors,
The agreement between CV simulation and experimental data is good without
the need of any free parameter to improve the fitting quality for several g
ate and substrate materials combinations. Finally, a simple law to estimate
substrate and poly-Si doping in n+/n+ MOS capacitor from CV curves is prop
osed.