A novel two-step laser crystallization technique for low-temperature poly-Si TFTs

We present investigations on a novel technique for preparing low-temperatur e poly-Si thin-film on glass substrate using two-step laser crystallization . In the first step, seeds are created by excimer laser induced crystalliza tion of very thin (M nm) amorphous silicon (a-Si) thin-film deposited by pl asma enhanced chemical vapor deposition (PECVD), A second (a-Si) thin-film of 80-120 nm is used to obtain large crystalline grains grown around the se ed crystallites during the second laser crystallization. Using this two-ste p crystallization (TSC) approach, we fabricated poly-Si thin-film transisto rs (TFTs) with electron mobility of 103 cm(2)/V.s and ON/OFF current ratio of 10(7). They are two times and four times higher than those of the poly-S i TFTs fabricated in the same run using conventional single-step excimer la ser crystallization.