Formation of diamond like carbon by a pure carbon arc under high vacuum

Citation
M. Tamba et al., Formation of diamond like carbon by a pure carbon arc under high vacuum, JPN J A P 1, 40(2B), 2001, pp. 1064-1066
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Volume
40
Issue
2B
Year of publication
2001
Pages
1064 - 1066
Database
ISI
SICI code
Abstract
The are discharge plasma of solid carbon has been applied to the formation of hard carbon thin films. A double-mesh electrode is placed at the exit of the sharply directed are plasma column confined in the magnetic bottle. Th e radio frequency voltage applied to the electrode is effective to diverge the plasma column radially to form a uniform plasma in front of the substra te and also to remove macroparticles. The characteristics of the obtained f ilm are examined using Raman spectra and other techniques.