The are discharge plasma of solid carbon has been applied to the formation
of hard carbon thin films. A double-mesh electrode is placed at the exit of
the sharply directed are plasma column confined in the magnetic bottle. Th
e radio frequency voltage applied to the electrode is effective to diverge
the plasma column radially to form a uniform plasma in front of the substra
te and also to remove macroparticles. The characteristics of the obtained f
ilm are examined using Raman spectra and other techniques.