G. Imada et al., Influences of floating particles produced by high-pressure, pulsed glow discharge on excimer laser excitation, JPN J A P 1, 40(2B), 2001, pp. 1144-1147
The floating particles produced by the high-pressure, pulsed glow discharge
on KrF excimer laser excitation have been visualized by the pulsed-laser s
catter method. The double-pulse discharge experiments have also been carrie
d out to study the effects of the floating particles on the discharge insta
bilities. The particles with diameters of the order of 100 mum are observed
in the discharge region just after the discharge. The number density of th
e particles increases to similar to2 particle/cm(3) at 200 ms after the dis
charge, and then decreases to similar to1 particle/cm(3) at 500 ms. In the
double-pulse experiment without gas flow, the probability of are formation
in the second discharge reduces at 300 ms after the first discharge. It has
been clearly demonstrated that the floating particles of the order of 100
mum hardly affect the discharge characteristics.