Influences of floating particles produced by high-pressure, pulsed glow discharge on excimer laser excitation

The floating particles produced by the high-pressure, pulsed glow discharge on KrF excimer laser excitation have been visualized by the pulsed-laser s catter method. The double-pulse discharge experiments have also been carrie d out to study the effects of the floating particles on the discharge insta bilities. The particles with diameters of the order of 100 mum are observed in the discharge region just after the discharge. The number density of th e particles increases to similar to2 particle/cm(3) at 200 ms after the dis charge, and then decreases to similar to1 particle/cm(3) at 500 ms. In the double-pulse experiment without gas flow, the probability of are formation in the second discharge reduces at 300 ms after the first discharge. It has been clearly demonstrated that the floating particles of the order of 100 mum hardly affect the discharge characteristics.